DESIGN The device for measuring the heat flux on microelectromechanical systems (MEMS) (optional)

摘要

The design of apparatus for measuring heat flow, consisting of a multilayer membrane, for example, five alternating layers, three layers of SiO ₂ and two layers of Si ₃ N _4, the membrane is supported on a frame of Si, deposited on the membrane thermoresistive element such as n- shaped or in the form of an open polygon, thermoresistive element surround battery thermocouple deposited on the membrane on the outside thermoresistive element and heat conducting layer of silicon oxide (SiO _2), the contact pads thermoresistive elements that are located on the frame, which supports the membrane, the hot junctions of the thermocouples are located on the membrane, and the cold junctions of the thermocouples are located contact pads on the frame on which the membrane rests. The device is a multi-purpose sensor, manufactured in a single process capable, heat flux, measured values ​​such as the AC power, the ambient pressure, liquid or gas flow rate, inclination and acceleration. The device is manufactured on semiconductor technology - photolithography, sputtering, isotropic and anisotropic etching.