Computer-Aided Design (CAD) for Integrated Microelectromechanical (MEMS) Devices

摘要

The objective of this 'CAD for Integrated MEMS Devices' research project was to develop MEMS CAD design and development tools that would facilitate the creation of behavioral models for complex MEMS devices. More complex and capable MEMS devices are becoming a reality to extend out country's technological leadership in military and commercial electronics, which in turn would help maintain our military superiority. To this end, the project focused on creating a uniform design environment for the design and simulation of high- performance, complex integrated MEMS systems. The initial activity focused primarily on the MEMS systems design, however it became clear that incorporating integrated circuit simulations with the MEMS behavioral models was a priority. This provided more accurate simulations of the integrated MEMS systems as well as the environment they were intended to operate within. The resulting design environment provides the designer with an increased likelihood of functional first silicon. High performance MEMS devices such as accelerometers and gyros require the MEMS, circuits and their interactions to be fully simulated - primarily because MEMS devices exhibit fundamentally more complex interactions than those required in conventional electronic CAD.