Anlaysis of bacteria in ultrapure water systems using fluorescent probe and culture method

摘要

Ultrapure water used in semiconductor manufacturing must be free of bacterial contamination because bacteria can cause wafer surface contamination through particulate and molecular impurities. Assessing the level of bacterial contamination in real-time is essential for maintaining high throughput and wafer quality. However, the current method of detecting and counting bacteria in ultrapure water is based on filtration and cvultivation techniques that require several days in order to obtain results.