LOW-PRESSURE c-BN DEPOSITION ― IS A CVD PROCESS POSSIBLE ?

摘要

Since the low-pressure diamond deposition was discovered in 1982 there is a high interest to find a similar process for the c-BN synthesis. During the last years many researchers propagated success, but many of them failed in analytical problems characterizing the BN coatings. A new paper by S. Matsumoto and W. Zhang shows c-BN deposition using a DC Plasma Jet and characterization by various analytical methods. Our experiments were carried out with a simple CVD reactor with out plasma activation. Various BN layers were deposited and characterized. X-ray diffraction, IR-spectroscopy and SIMS indicate that BN-coatings containing c-BN were deposited. However a final verification of c-BN crystallites by TEM investigations was not possible till now.