Thin film passivation for organic light emitting diodes with SiON/Ag/SiON multilayer grown on flexible PES substrate by roll-to-roll sputtering system

摘要

We have investigated the characteristics of SiON/Ag/SiON multilayer passivation grown by specially designed roll-to-roll (RTR) sputtering system using the PES substrate for organic light emitting diodes. The SiON/Ag/SiON multilayer thin film passivation on a PES substrate had a high transmittance of 87.7 % and low water vapor transmission rate (WVTR) had low value at optimized conditions. Using field emission scanning electron microscope (FESEM) examinations. This indicates that a SiON/Ag/SiON multilayer passivation is a promising thin film passivation scheme for organic light emitting diodes.