Mean failure time interval prediction control system for harmful gas emission device due to powder accumulation based on hostile neural network

摘要

The average failure time interval predictive control system for harmful gas emission devices due to powder accumulation based on hostile neural networks is a by-product integration facility, plasma cyclone facility, and catalytic cyclone facility used in the manufacturing process of electronic components including semiconductors or display devices. Basic facility information And, based on the operating conditions of each facility, the standard condition test programming method (Real) that first learns the signal data collected from each facility and calculates the optimal operating conditions for each facility including the Mean Time Between Failure Optimal operation of each facility, including the Mean Time Between Failure, which requires actual preventive maintenance by comparing the pattern with the preset management limit while receiving the process progress status of each facility in real time with the processing unit The generator design of experiments processing unit that calculates the conditions, the optimal operating conditions of each facility calculated by the real specification design of experiments processing unit, and the generator design of experiments It is characterized in that it includes a discriminator that automatically predicts the Mean Time Between Failure by comparing the optimal operating conditions of each facility calculated by the processing unit.