Device for cleaning pot-shaped hollow bodies, in particular transport containers for semiconductor wafers or for EUV lithography masks

摘要

The present invention relates to a device (10) for cleaning pot-shaped hollow bodies (12), in particular transport containers (30) for semiconductor wafers or for EUV lithography masks, the device (10) having a support wall (20) on which the hollow body (12) can be placed with the edge surface (38), a locking device (26) with which the hollow body (12) can be connected to the support wall (20) in a sealing and detachable manner, at least one through-opening (24 ), which is arranged radially inside the locking device (26), a cleaning device (40) with which a first cleaning fluid for cleaning the inner surface (33) of the hollow body can be released when the hollow body (12) is connected to the support wall (20), and a first bleed duct (70) having a first end (72), said first bleed duct (70) having said first end (72) in fluid communication only with said through-opening (24). stands and with which the cleaning device (40) delivered first cleaning fluid can be removed.