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ATOMIC-FORCE MICROSCOPE USING ARTIFICIAL INTELLIGENCE OBJECT RECOGNITION TECHNOLOGY AND METHOD FOR OPERATING SAME

机译:原子力显微镜使用人工智能对象识别技术和操作方法

摘要

An atomic-force microscope of the present invention may comprise: a sample stage for accommodating a sample; a cantilever to be arranged on the sample and including a probe; a laser for irradiating a laser beam to the cantilever; a photo-detector for receiving the laser beam reflected from the cantilever; a first camera for photographing the sample and the cantilever; a second camera for photographing the cantilever and a laser spot irradiated by the laser; and a processor which is electrically connected to the first camera, the second camera, and the photo-detector and processes data obtained from the photo-detector. A method for operating the atomic-force microscope of the present invention may comprise: a step of sensing the positions of the cantilever and the sample through the first camera; a step of adjusting the position of the sample; a step of sensing the positions of the laser and the cantilever through the second camera; a step of aligning the laser; a step of sensing the position of the laser beam through the photo-detector; and a step of aligning the position of the photo-detector.
机译:本发明的原子力显微镜可包括:用于容纳样品的样品阶段;悬臂布置在样品上并包括探针;用于照射激光束到悬臂的激光器;用于接收从悬臂反射的激光束的光检测器;用于拍摄样品和悬臂的第一台相机;用于拍摄悬臂的第二相机和激光照射的激光点;和电连接到第一相机​​,第二相机和光电检测器的处理器以及从光检测器获得的数据。用于操作本发明的原子力显微镜的方法可以包括:通过第一相机感测悬臂和样品的位置的步骤;调整样品位置的步骤;通过第二次相机感测激光和悬臂的位置的步骤;对准激光的步骤;通过光电检测器感测激光束位置的步骤;和对准光检测器的位置的步骤。

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