首页> 外国专利> A DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD

A DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD

机译:一种装置,该装置包括由具有电隔离屏障的沟槽围绕的阳极多孔区域,以及相应的方法

摘要

The present invention relates to an electrical device comprising:a metal barrier layer (102),an anodic porous oxide region (AAO) on the metal barrier layer,a trench (104) around the anodic porous oxide region reaching the metal barrier layer,a liner (107) at least on the wall (106) of the trench on the side of the anodic porous oxide region forming an electrical isolation barrier and having an opening (109) onto the anodic porous oxide region,a hard mask (108) arranged above the trenches and the liner having an opening (109) onto the anodic porous oxide region.;The invention also relates to the corresponding manufacturing method.
机译:本发明涉及一种包括:金属阻挡层(102),金属阻挡层上的阳极多孔氧化物区(AAO),围绕金属阻挡层的沟槽(104),围绕金属阻挡层,a 衬垫(107)至少在阳极多孔氧化物区域的侧面的沟槽的壁(106)上形成电隔离屏障并且在阳极多孔氧化物区域上具有开口(109),布置硬掩模(108) 在沟槽上方和具有开口(109)的衬里上方,在阳极多孔氧化物区域上。;本发明还涉及相应的制造方法。

著录项

  • 公开/公告号EP3940804A1

    专利类型

  • 公开/公告日2022-01-19

    原文格式PDF

  • 申请/专利权人 MURATA MANUFACTURING CO. LTD.;

    申请/专利号EP20200305800

  • 发明设计人 SOULIER BRIGITTE;VOIRON FRÉDÉRIC;

    申请日2020-07-13

  • 分类号H01L49/02;C25D11/04;H01G4/33;

  • 国家 EP

  • 入库时间 2022-08-24 23:28:00

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