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A DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD
A DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD
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机译:一种装置,该装置包括由具有电隔离屏障的沟槽围绕的阳极多孔区域,以及相应的方法
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摘要
The present invention relates to an electrical device comprising:a metal barrier layer (102),an anodic porous oxide region (AAO) on the metal barrier layer,a trench (104) around the anodic porous oxide region reaching the metal barrier layer,a liner (107) at least on the wall (106) of the trench on the side of the anodic porous oxide region forming an electrical isolation barrier and having an opening (109) onto the anodic porous oxide region,a hard mask (108) arranged above the trenches and the liner having an opening (109) onto the anodic porous oxide region.;The invention also relates to the corresponding manufacturing method.
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