SUBSTRATE CONVEYANCE DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CONVEYING METHOD, ELECTRONIC DEVICE PRODUCTION METHOD, PROGRAM AND STORAGE MEDIUM

摘要

[Problem] It relates to conveyance of a board|substrate cut out from a large size board|substrate, Comprising: It is suppressing the dispersion|variation in the conveyance position by the difference of a cutout position. [Solution Means] The substrate transport apparatus includes transport means for transporting any one of a plurality of substrates obtained by dividing a large substrate to a delivery position in the processing apparatus, and transferring the substrate to a substrate supporting means provided in the processing apparatus; , and control means for controlling the conveying means. The acquisition means acquires board|substrate information regarding the site|part in the large-sized board|substrate before division|segmentation of the board|substrate conveyed by the conveyance means. The control means transfers the substrate to the delivery position by the carrying means on the basis of the substrate information acquired by the acquisition means.