DISPATCHING METHOD FOR SEMICONDUCTOR PROCESS PRODUCTION LINE, STORAGE MEDIUM AND SEMICONDUCTOR DEVICE

摘要

The present application relates to a dispatching method for a semiconductor process production line, a storage medium and a semiconductor device. The dispatching method for a semiconductor process production line can acquire an overlay error reference curve of a product lot to be exposed on a machine, and set an overlay error range according to the overlay error reference curve. After the exposure is completed, an overlay error of said product lot can be acquired, and a determination can be made as to whether the overlay error falls within the overlay error range. If the overlay error of said product lot does not fall within the overlay error range, the machine can be used to continue processing said product lot. If the overlay error of said product lot falls within the overlay error range, it indicates that the difference between the exposure energies of two adjacent product lots processed by the machine is relatively large, and it is necessary to perform pre-cooling processing on the machine, so that the overlay error is within an acceptable range, and the yield of semiconductor products is ensured.