HIGH REFLECTANCE AND HIGH THERMAL STABILITY IN REACTIVELY SPUTTERED MULTILAYERS

摘要

A multilayer film structure, and method of making such a multilayer film structure, which includes a first layer consisting essentially of a first material and a second layer consisting essentially of a second material. In various aspects, the multilayer film structure includes a plurality of first layers alternating with a plurality of second layers. The layers are constructed by applying a N2-based reactive sputtering methodology so that the layers maintain a largely amorphous microstructure and a stable and high reflectivity upon annealing at temperatures up to 800 °C for 1 hour.