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HIGH REFLECTANCE AND HIGH THERMAL STABILITY IN REACTIVELY SPUTTERED MULTILAYERS
HIGH REFLECTANCE AND HIGH THERMAL STABILITY IN REACTIVELY SPUTTERED MULTILAYERS
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机译:反应溅射多层的高反射率和高热稳定性
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摘要
A multilayer film structure, and method of making such a multilayer film structure, which includes a first layer consisting essentially of a first material and a second layer consisting essentially of a second material. In embodiments, the multilayer film structure includes a plurality of first layers alternating with a plurality of second layers. The layers are constructed by applying a N2-based reactive sputtering methodology so that the layers maintain a largely amorphous microstructure and a stable and high reflectivity upon annealing at temperatures up to 800° C. for 1 hour.
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