Apparatus for sealing two spaces filled with different fluids in MEMS sensor devices

摘要

The present invention relates toA sealing device (1) for sealing a fluid filled space (2) in a MEMS sensor device;Provided with a seal structureThe seal structureHaving a passage (5) connected to space (2);A sealing member (6) for sealing the passage (5) is disposed in the passage (5);The passages (5) and / or the seal member (6) areThe sealing member (6) in the passage (5) is sealed and fixed by mechanical clamping.