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Multi-dimensional integrated chip design and manufacturing processes using wafer stacking techniques
Multi-dimensional integrated chip design and manufacturing processes using wafer stacking techniques
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机译:使用晶片堆叠技术的多维集成芯片设计和制造工艺
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摘要
This disclosure concerns a process for the creation of a multi-dimensional integrated chip design.In some designs, the process can be performed by bonding a second substrate to a surface of a first substrate.There will be a first edge rim section along a first loop and up to a first circumference section of thesecond substrates carried in.A second edge rim section is carried out along a second loop and up to a second circumference section of the second substrate and into the first substrate.A third edge rim section is carried out along a third loop and up to a third circumference section of the first substrate.
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