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High Efficiency Solar Absorber Based on Tungsten by Atomic Layer Deposition and Manufacturing Method Thereof
High Efficiency Solar Absorber Based on Tungsten by Atomic Layer Deposition and Manufacturing Method Thereof
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机译:基于原子层沉积及其制造方法的高效太阳能吸收器
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摘要
The present embodiments provide a solar absorber capable of depositing tungsten on a substrate having a nanopillar structure using a plasma enhanced atomic layer deposition method, and improving the solar absorption rate by adjusting the aspect ratio of the nanopillar structure, and a method for manufacturing the same.
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