HYBRID BACK-END-OF-LINE (BEOL) DIELECTRIC FOR HIGH CAPACITANCE DENSITY METAL-OXIDE-METAL (MOM) CAPACITOR

摘要

Certain aspects of the present disclosure generally relate to a hybrid back-end-of-line (BEOL) dielectric for a high capacitance density metal-oxide-metal (MOM) capacitor, especially in lower BEOL layers. One example semiconductor device includes an active layer and a first metal layer disposed above the active layer. The first metal layer generally includes: a first electrode; a second electrode, wherein the first and second electrodes have interdigitated fingers; a first dielectric material disposed at least partially between at least two adjacent fingers of the first and second electrodes; and a second dielectric material, wherein the second dielectric material is different from the first dielectric material and wherein the first electrode, the second electrode, and the first dielectric material compose a portion of a metal-oxide-metal (MOM) capacitor.