Loot risk score based dynamic lot measurement control method and system based on equipment confidence index

摘要

Provided is a lot risk score-based dynamic lot measurement control method and system based on an equipment reliability index. A measurement control method according to an embodiment of the present invention calculates an equipment reliability index of a specific equipment for a specific process in semiconductor manufacturing, and determines a specific equipment for a specific process based on the equipment reliability index. Of the semiconductor product processed by the specific equipment for the specific process is determined based on the risk score. As a result, since it is possible to monitor/manage the quality with a difference according to the equipment reliability index, the measuring instrument can be used efficiently, and the quality/yield can be improved through timely measurement. The convenience of management can be improved through automatic/dynamic lot measurement control. [Selection diagram] Figure 1