Loot risk score based dynamic lot measurement control method and system based on equipment confidence index

摘要

A lot of (lot) risk score based dynamic lot measurement control method and system based on the equipment confidence index are provided.A measurement and control method according to one embodiment of the present invention calculates the reliability index of a particular equipment for a particular process in semiconductor manufacturing, calculates the risk score of a particular appliance for a particular process based on the equipment reliability index, and provides a specific step for specific processes based on the risk score It is determined whether or not the semiconductor product processed by the constant equipment is measured.Therefore, it is possible to use the measuring instrument efficiently, and to improve the quality \/ yield through the timely measurement, and to improve the convenience of management through automatic \/ dynamic lot measurement control .Diagram