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Method of producing thin layer of large area transition metal dichalcogenides MoS2 and others
Method of producing thin layer of large area transition metal dichalcogenides MoS2 and others
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机译:制造大面积过渡金属二甲基化物MOS2的薄层和其他方法
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摘要
An ultra-thin film transition metal dichalcogenide (“TMD”) supported on a support. The TMD is formed from a metal grown by atomic layer deposition (“ALD”) on a substrate. The metal is sulphurized to produce a TMD ultra-thin layer.
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