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Solution composition for forming thin film of transition metal dichalcogenide and method for producing transition metal dichalcogenide thin film using the same
Solution composition for forming thin film of transition metal dichalcogenide and method for producing transition metal dichalcogenide thin film using the same
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机译:用于形成过渡金属二甲烷的薄膜的溶液组合物及其使用相同的制备过渡金属二甲烷薄膜的方法
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摘要
The present invention relates to a solution composition for forming a transition metal dichalcogenide thin film and a method for manufacturing a transition metal dichalcogenide thin film using the same, and more particularly, dimethylformamide, butylamine and ethanolamine ( By dissolving a precursor of a transition metal dichalcogenide in a mixed organic solvent containing ethanolamine) and adding a separate sulfur-added carbon disulfide (CS 2 )-containing solution to prepare a solution for thin film formation, conventional chemical vapor phase It relates to a method of manufacturing a transition metal dichalcogenide thin film for an electronic device and an optical device that can be manufactured by simple heat treatment after coating the solution without using a deposition method. According to the present invention, by dissolving the precursor of the transition metal dichalcogenide compound in a mixed organic solvent containing dimethylformamide, butylamine and ethanolamine, the solubility of the precursor is increased and a chemically stable solution for forming a thin film is prepared possible. In addition, by using the solution for forming the thin film, it is possible to easily form a large-area transition metal dichalcogenide thin film by employing a coating or printing process without using CVD.
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