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Photosensitive resin composition, method for forming resist pattern, method for producing plating molding, and semiconductor device
Photosensitive resin composition, method for forming resist pattern, method for producing plating molding, and semiconductor device
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机译:光敏树脂组合物,形成抗蚀剂图案的方法,生产电镀成型的方法和半导体器件
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摘要
Excellent resolutionA photosensitive resin composition capable of forming a resist pattern capable of corresponding to copper plating and nickel platingMethod for forming resist pattern using photosensitive resin compositionManufacturing method of plating molding using resist patternFor the purpose of providing a semiconductor device having a plating structureThe composition isThe structural unit (A1) shown in the following formula (A1)The structural unit (A2) shown in the following expression (A2)A polymer (a) and a photoacid generator (b) having a structural unit (A3) shown in the following formula (A3) are included.In formula (A3), R33 indicates a hydroxyl aryl group.
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