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Stacked photonic III-V semiconductor device

机译:堆叠光子III-V半导体器件

摘要

Stack-shaped photonic III-V semiconductor component (10), comprising - a first metallic connection contact layer (20) formed at least in some regions, - a highly doped first semiconductor contact layer (16) of a first conductivity type formed at least in some regions with a dopant concentration of at least 1 · 1018cm-3 and with a first lattice constant, - an absorption area (12) of the first conductivity type with a dopant concentration of 8 · 1011cm-3- 8 · 1014cm-3, a layer thickness (D12) of 80 µm - 2000 µm or 500 µm - 2000 µm or 900 µm - 2000 µm, with a first energy band gap and with the first lattice constant, - a highly doped second semiconductor contact layer (14) of a second conductivity type, formed at least in regions, with a dopant concentration of at least 1 · 1018 cm-3 and a layer thickness (D14) of at most 100 µm or at most 50 µm, - a second metallic connection formed at least in certain areas Contact layer (18), wherein the first semiconductor contact layer (16) is designed as a mesa structure with an underside, an upper side, a mesa width (B16) and a mesa height (D16) and the underside of the first semiconductor contact layer (16) is arranged on or above a first surface section of an upper side of the absorption area (12) with a width that corresponds to the mesa width (B16), - the second semiconductor contact layer (14) is arranged with an upper side facing the absorption area (12) below the absorption area (12) and - the second metallic connection contact layer (18) is materially connected to an underside of the second semiconductor contact layer (14), photonic III-V semiconductor component (10) a III-V semiconductor passivation layer (22) m it has the first lattice constant and a second energy band gap which differs from the first energy band gap, the III-V semiconductor passivation layer (22) having the first or the second conductivity type and a dopant concentration of 1 · 1014cm-3 · 5 · 1018cm-3, - the III-V semiconductor passivation layer (22) at a first distance (A1) of at least 0.2 μm or at least 2 μm or of at least 10 μm or of at least 20 μm or of at least 40 μm from the mesa structure of the first semiconductor contact layer the upper side of the absorption area (12) and is connected to the upper side of the absorption area (12) in a materially bonded manner.
机译:堆叠形光子III-V半导体部件(10),包括 - 至少在一些区域中形成的第一金属连接接触层(20) - 至少形成的第一导电类型的高度掺杂的第一半导体接触层(16)在具有掺杂剂浓度的一些区域中至少1·1018cm-3和第一晶格常数, - 第一导电类型的吸收区域(12),掺杂剂浓度为8·1011cm-3-8·1014cm-3 ,具有80μm - 2000μm或500μm-2000μm或900μm-2000μm的层厚度(D12),具有第一能带隙和第一晶格常数, - 高度掺杂的第二半导体接触层(14)在至少在区域中形成的第二导电类型,掺杂剂浓度为至少1·1018cm-3和最多为100μm或至多50μm的层厚度(D14) - 形成在第二个金属连接至少在某些区域接触层(18)中,其中第一半导体接触层(16)是设计作为具有下侧,上侧,台面宽度(B16)和台面高度(d16)的台面结构,并且第一半导体接触层(16)的下侧布置在上部的第一表面部分上或上方吸收区域(12)的侧面,其宽度对应于MESA宽度(B16), - 第二半导体接触层(14)布置有面向吸收区域(12)下方的吸收区域(12)的上侧 - 第二金属连接接触层(18)具有实质连接到第二半导体接触层(14)的下侧,光子III-V半导体组件(10)A III-V半导体钝化层(22)M具有第一晶格常数和第二能带隙,其不同于第一能带隙,具有第一或第二导电类型的III-V半导体钝化层(22)和1·1014cm-3·5·1018cm的掺杂剂浓度-3, - III-V半导体钝化层(22)在第一半导体接触层的MESA结构的第一距离(A1)至少为0.2μm或至少2μm或至少10μm或至少40μm或至少40μm的至少40μm或至少40μm。吸收区域(12)并以物质粘合的方式连接到吸收区域(12)的上侧。

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