SUSCEPTOR ARRANGEMENT, MOCVD DEVICE INCLUDING THIS, AND CONTROL PROCEDURES FOR UNLOADING AN UPPER SUSCEPTOR FROM A MOCVD DEVICE

摘要

The present invention relates to a susceptor assembly and a MOCVD device comprising the same, in which a two-layer structure comprising an upper susceptor and a lower susceptor reduces a temperature deviation at a support surface. A susceptor assembly according to an embodiment of the present invention comprises: a upper susceptor having a support surface configured to be in contact with a substrate to support the substrate; and a lower susceptor configured to support the upper susceptor, the upper susceptor and lower susceptor being coated with different types of materials. The susceptor assembly and the MOCVD apparatus comprising it in accordance with the present invention reduce the non-uniformity of temperature at the support surface for supporting the substrate, thereby enabling a thin film to be grown with better uniformity on the substrate and obtaining a high yield in the manufacture of an element using the substrate grown by an MOCVD process.