MOCVD APPARATUS USING SUSCEPTOR ASSEMBLY AND CONTROL METHOD FOR PICKING OUT UPPER SUSCEPTOR FROM THE SAME

摘要

The present invention withdraws the upper susceptor from the MOCVD apparatus and the MOCVD apparatus including a susceptor assembly that can easily withdraw the upper susceptor while reducing the temperature deviation on the support surface by the two-layer structure of the upper susceptor and the lower susceptor. It is to provide a control method for. MOCVD apparatus according to an embodiment of the present invention, the upper susceptor having a support surface for supporting the substrate while in contact with the substrate; A lower susceptor supporting the upper susceptor; And an induction coil disposed to surround a side surface of the upper susceptor and a side surface of the lower susceptor. It includes. The induction coil is configured such that the top turn surrounds only a portion of the top susceptor, so that the top susceptor can pass through a space not occupied by the top turn. According to the MOCVD apparatus of the present invention and a control method for withdrawing the upper susceptor from the MOCVD apparatus, the upper susceptor can be easily removed in a minimum space while heating the part of the upper susceptor while increasing efficiency. Efficiency, compactness and high maintenance excellence can be expected.