DROPLET CATCHER, DROPLET CATCHER SYSTEM OF EUV LITHOGRAPHY APPARATUS, AND MAINTENANCE METHOD OF THE EUV LITHOGRAPHY APPARATUS

摘要

A droplet catcher system of an EUV lithography apparatus is provided. The droplet catcher system includes a catcher body, a heat transfer part, a heat exchanger, and a controller. The catcher body has an outer surface. The heat transfer part is directly attached to the outer surface of the catcher body. The heat exchanger is thermally coupled to the heat transfer part. The controller is electrically coupled to the heat exchanger.