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Glass powder filling equipment into wafers

机译:玻璃粉末灌装设备进入晶圆

摘要

An apparatus for filling glass powder into wafers belonging to the technical field of electronic device production equipment, comprising a support device for supporting the wafer, a loading device (5) and a scraping device (6), the loading device (5) and the scraping device ( 6) are all installed on the upper side of the supporting device, and the picking unit is mounted on the lower side of the loading device (5) to drive the picking unit to move, and the scraper (43) is mounted on the lower side of the scraping device (6) to install the scraper (43) Disclosed is an apparatus for filling glass powder into a wafer, characterized in that it drives to move. In the glass powder filling device to the corresponding wafer, the loading device evenly places the glass powder on the wafer through the picking part, and the scraping device removes the residual glass powder on the wafer through the scraper, thereby ensuring the proper amount of the glass powder on the wafer In addition to preventing the problem that the subsequent processing process becomes complicated due to excessive glass powder, it is also possible to prevent the problem of non-uniform distribution of the glass powder. The yield is improved and the production cost of the product is reduced.
机译:一种用于将玻璃粉末填充到属于电子器件生产设备技术领域的晶片中的装置,包括用于支撑晶片的支撑装置,装载装置(5)和刮削装置(6),装载装置(5)和刮削装置(6)全部安装在支撑装置的上侧,并且拣选单元安装在装载装置(5)的下侧上以驱动拣选单元移动,并且刮刀(43)安装在安装在刮削装置(6)的下侧安装,所公开的刮刀(43)是用于将玻璃粉末填充到晶片中的装置,其特征在于它驱动移动。在玻璃粉末填充装置到相应的晶片中,装载装置通过拾取部分均匀地将玻璃粉末放置在晶片上,并且刮擦装置通过刮刀去除晶片上的残余玻璃粉末,从而确保了适当的量晶片上的玻璃粉末除了防止后续加工过程由于过量的玻璃粉末而变得复杂的问题,还可以防止玻璃粉末的不均匀分布的问题。产量提高,产品的生产成本降低。

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