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SEMICONDUCTOR DEVICE FOR AMBIENT SENSING INCLUDING A CAVITY AND A MECHANICAL FILTERING STRUCTURE
SEMICONDUCTOR DEVICE FOR AMBIENT SENSING INCLUDING A CAVITY AND A MECHANICAL FILTERING STRUCTURE
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机译:用于环境传感器的半导体器件,包括腔和机械过滤结构
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摘要
A semiconductor device for ambient sensing including: a cap traversed by a hole; and a main body mechanically coupled to the cap so as to delimit a cavity, which is interposed between the main body and the cap. The main body includes a semiconductor body and a coupling structure, which is interposed between the semiconductor body and the cap and laterally delimits a channel, which fluidically couples the cavity and the hole. The channel performs a mechanical filtering that is finer than the mechanical filtering performed by the hole.
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