Key Laboratory of Beam Technology and Material Modification of Ministry of Education;
Institute of Low Energy Nuclear Physics;
Beijing Normal University;
Beijing Radiation Center;
Beijing 100875;
China Key Laboratory of Beam Technology and Material Modification of Ministry of Education;
Institute of Low Energy Nuclear Physics;
Beijing Normal University;
Beijing Radiation Center;
Beijing 100875;
China Key Laboratory of Beam Technology and Material Modification of Ministry of Education;
Institute of Low Energy Nuclear Physics;
Beijing Normal University;
Beijing Radiation Center;
Beijing 100875;
China Key Laboratory of Beam Technology and Material Modification of Ministry of Education;
Institute of Low Energy Nuclear Physics;
Beijing Normal University;
Beijing Radiation Center;
Beijing 100875;
China;
multilayer; filtered; arc; nanometer; wear;