Self recognition and correction heterogeneous platform incorporating integrated semiconductor processing module and its usage

摘要

This disclosure relates to a mass production system for processing and measuring a workpiece in a semiconductor processing sequence without leaving a controlled environment (e.g., atmospheric pressure) of the system.The process chamber of the system is connected to each other via a transfer chamber used to move the workpiece between the process chambers in a controlled environment.The transport chamber includes measuring modules that can measure the attributes of the workpiece before and after process processing.The measurement module may include an inspection system mounted above, below, or inside the transport chamber.