EQUIRESISTANT PROBE DISTRIBUTION FOR HIGHACCURACY VOLTAGE MEASUREMENTS AT THE WAFER LEVEL

摘要

A test system and test technique are provided for accurate high-current parameter testing of semiconductor devices. In operation, the test system supplies a current to the semiconductor device and measures the voltage on the device. The test system may use the measured voltage to calculate an ON resistance for the high current semiconductor device. In one technique, multiple force needles contact a pad at a location that provides a path with approximately equal resistance to one or more sensing needles contacting the same pad. In another technique, the current flow through the force needle is adjusted such that the voltage at the pad of the device under test represents the ON resistance of the device and is independent of the contact resistance of the force needle. Another technique involves generating a warning indication when the contact resistance of the force needle exceeds a threshold.