Systems and methods for generating multi-channel tunable lighting from broadband sources

摘要

The metrology system includes an illumination source for generating an illumination beam, a multi-channel spectral filter, a focusing element for directing illumination from a single optical column to a sample, and at least one detector for capturing illumination collected from the sample . A multi-channel spectral filter includes two or more filtering channels with two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on the two or more spectral transmittance distributions. The multi-channel spectral filter further includes a channel selector for directing at least a portion of the illumination beam to the at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner for coupling illumination from the two or more filtering channels to a single optical column.