A FERROELECTRIC CAPACITOR, A FERROELECTRIC MEMORY CELL, AN ARRAY OF FERROELECTRIC MEMORY CELLS, AND A METHOD OF FORMING A FERROELECTRIC CAPACITOR

摘要

A ferroelectric capacitor comprises two conductive capacitor electrodes having ferroelectric material there-between. At least one of the capacitor electrodes comprise M_xSiO_y, where "M" is at least one of Ru, Ti, Ta, Co, Pt, Ir, Os, Mo, V, W, Sr, Re, Rh, Pd, La, Zn, In, Sn, and Nb. Other aspects, including method, are disclosed.