The invention relates to a method for laser processing a workpiece (23'), having the steps of: dividing a preferably pulsed laser beam into a plurality of sub-beams (22'), each of which is in one of two differing polarization states, and processing the workpiece (23') by focusing the plurality of sub-beams (22') in a plurality of at least partly overlapping sub-regions (25A') of a continuous interaction region (25), wherein sub-beams (22') are focused in respective different polarization states in adjacent sub-regions (25A') of the continuous interaction region (25). The invention also relates to an optical processing system for laser processing a workpiece (23') and to a laser processing device which has such an optical processing system.
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