Droplet driven micro valve controlled liquid flow device by electrowetting

摘要

Problem to be solved: to provide a liquid drip controlled micro valve control liquid distribution apparatus using electrowetting with high control accuracy, simple structure, convenient use and strong adaptability.Valve body 1 andLiquid injection micro passage 8 andIncluding liquid outlet 3The valve bodyA cavity 1-1 is provided.The liquid injection micro passageConnected to the upper end of the cavityIn the center of the cavityA closing holder 4 is provided.Between the blocking holder and the cavity wallA communication port is provided.The communication portA micro valve control mechanism is provided for controlling the closing and opening of the communication port.The microvalve control mechanism comprises an elastic diaphragm 6 for closing and opening the communication port disposed at the lower end of the communication port, and an electrowetting driving mechanism 7 for driving the elastic diaphragm to swell around the cavity side wall.Diagram