MICRO-NANO STRUCTURE ASSEMBLY MANUFACTURING METHOD, AND MICRO-NANO STRUCTURE ASSEMBLY MANUFACTURED BY MEANS OF SAME

摘要

A method for manufacturing a micro-nano structure assembly, comprising: providing a filter membrane; providing an MEMS sensor, wherein the MEMS sensor is provided with an opening and can perform sensing by means of the opening; and bonding the filter membrane onto the MEMS sensor, so that the filter membrane covers the opening. The method for providing the filter membrane comprises: coating a substrate (108) with a filter membrane material layer (107), and then coating the filter membrane material layer with a photoresist layer (106); heating the substrate (108) to soften the photoresist layer; using a mold to pressurize the substrate (108), wherein the mold consists of a pattern layer (104) and a back layer (102) that are superimposed, and the back layer is pressurized to make the pattern layer be in contact with the photoresist layer; when continuously using the mold to pressurize the photoresist layer, cooling the photoresist layer to solidify the photoresist layer so as to form, on the photoresist layer, a pattern conforming to the pattern layer; removing the mold; by means of dry etching, removing a photoresist remaining on the pattern; and using the photoresist layer as a mask to perform dry etching or wet etching on the filter membrane material layer (107) so as to transfer the pattern of the photoresist layer onto the filter membrane material layer.