MICRO-NANO STRUCTURE ASSEMBLY MANUFACTURING METHOD AND MICRO-NANO STRUCTURE ASSEMBLY MANUFACTURED BY THE METHOD

摘要

The method for manufacturing the micro-nano structure assembly comprises: providing a filter membrane; providing an MEMS sensor, wherein the MEMS sensor is provided with an opening and can perform sensing through the opening; bonding the filter membrane to the MEMS sensor such that the filter membrane covers the opening. Providing the filter membrane comprises: heating a substrate (108) coated with a photoresist layer (106) to soften the photoresist layer (106) (202); pressurizing the substrate (108) with a mold, the mold consisting of a pattern layer (104) and a back layer (102) that are superimposed, wherein the back layer (102) being pressurized such that the pattern layer (104) contacts the photoresist layer (106) (204); cooling the photoresist layer (106) to solidify the photoresist layer (106) while continuously pressurizing the photoresist layer (106) with the mold, thereby forming a pattern conforming to the pattern layer (104) on the photoresist layer (106) (206); removing the mold, removing the photoresist remaining on the pattern by dry etching (208); depositing a filter membrane material (107) on the photoresist layer (106) (210); peeling off the photoresist layer (106) from the substrate (108) (212).