MEMS SENSOR ASSEMBLY MANUFACTURING METHOD AND MEMS SENSOR ASSEMBLY MANUFACTURED BY METHOD

摘要

A method for manufacturing an MEMS sensor assembly, comprising: providing a filter membrane (104), comprising coating a buffer material on one surface of a substrate (100) where a heat release adhesive layer (106) covers to form a buffer layer (102) on the heat release adhesive layer (106), and depositing a filter membrane material on the buffer layer (102) to form the filter membrane (104); heating the substrate (100) so that the buffer layer (102) and the filter membrane (104) together are pushed away from the substrate (100) under the action of the heat release adhesive layer (106); removing the buffer layer (102) from the filter membrane (104); providing an MEMS sensor having an opening and capable of sensing by means of the opening; and bonding the filter membrane (104) to the MEMS sensor so that the filter membrane (104) covers the opening. The method reduces the risk of physical damage to the filter membrane (104) in a manufacturing process.