MEMS SENSOR ASSEMBLY MANUFACTURING METHOD AND SENSOR ASSEMBLY MANUFACTURED BY MEANS OF SAID METHOD

摘要

A MEMS sensor assembly manufacturing method and a MEMS sensor assembly. The manufacturing method comprises: providing a filter membrane, comprising micrometer-scale or nanometer-scale objects (102) coated on a substrate (100); depositing a filter membrane material (104) on the substrate (100); removing the micrometer-scale or nanometer-scale objects (102), so as to form through holes (106) in the deposited filter membrane material (104). The manufacturing method further comprises providing a MEMS sensor, the MEMS sensor having thereon an opening, and being capable of performing sensing via the opening. The manufacturing method further comprises joining the filter membrane onto the MEMS sensor, causing the filter membrane to cover the opening, thereby forming a MEMS sensor assembly.