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Substrate for temperature compensated surface acoustic wave device or bulk acoustic wave device
Substrate for temperature compensated surface acoustic wave device or bulk acoustic wave device
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机译:用于温度补偿表面声波装置或散装声波装置的基板
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摘要
A substrate for a surface acoustic wave device or bulk acoustic wave device, comprising a support substrate and an piezoelectric layer on the support substrate, wherein the support substrate comprises a semiconductor layer on a stiffening substrate having a coefficient of thermal expansion that is closer to the coefficient of thermal expansion of the material of the piezoelectric layer than that of silicon, the semiconductor layer being arranged between the piezoelectric layer and the stiffening substrate.
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