A method for regenerating a member in a silicon single crystal pulling device, a regenerating device, and a method for manufacturing a silicon single crystal using the regenerated member.

摘要

PROBLEM TO BE SOLVED: To prevent glow discharge in a pulling device and reduce power consumption without increasing a voltage applied to a heater when regenerating a member to which silicon or the like adheres in the silicon single crystal pulling device. To play. SOLUTION: A closed chamber, a heat insulating cylinder provided in the chamber, and a tubular heater provided inside the heat insulating cylinder are provided inside a tubular heater of a silicon single crystal pulling device. When a member to which SiOx and / or metallic silicon is attached is arranged and heat-treated in an inert gas atmosphere, a heat insulating plate covering the upper part of the member arranged inside the tubular heater is provided in the chamber. It is preferable that the heat insulating plate is provided with one or more through holes for the inert gas to flow through. [Selection diagram] Fig. 1