Cathode member for electron beam generation and its manufacturing method

摘要

Problem to be solved: to provide an electron beam generating cathode member excellent in electron emission characteristics and a manufacturing method thereof.SolutionThe electron beam generating cathode member of the present invention has a single or two phase of the compound consisting of iridium and cerium occupies over 95% or more of the metal iridium, and the content of the sub component of one or more of the oxides of the element of one or more elements of iridium and cerium is Below.Manufacturing method of the cathode member for producing electron beamDissolution process of dissolving metallic cerium raw material and metal iridium raw material to obtain molten materialPulverizing process of pulverizing the melt and pulverizing the meltSintering process in which the crushed material of the melt material is sintered at a predetermined high temperature and high pressure atmosphere to obtain the sintered material for sintering, andSintered material for forming the crystalline body is used.It includes a crystal preparation process for producing a crystal of an compound consisting of iridium and cerium in the floating zone method.Diagram