Hollow Cathode Produced Electron Beams for Plasma Generation: Cathode Operation in Gas Mixtures

摘要

Pulsed hollow cathode discharges, used to generate kilovolt electron beams for the production of plasmas, were studied in low pressure (50-70 mTorr) backgrounds of argon, oxygen, nitrogen, SF sub 6 and mixtures thereof. Cathode currents were measured as a function of cathode voltage, duty factor, and relative gas concentration. The cathode current was found to have a dependence on all variables, with the greatest impact being operating gas for all voltages and duty factors. The ambient gas is thought to influence the production of secondary electrons at the cathode surface thereby impacting the operation of the hollow cathode discharge and electron beam production.