Valve device, fluid control device, fluid control method, semiconductor manufacturing device and semiconductor manufacturing method

摘要

A valve device capable of controlling a large flow rate more stably while improving sealing performance and miniaturization is provided. The valve body 2, the tubular member 3 provided in the receiving recess 23 and communicating with the first flow path 21, the valve seat 48 supported by the tubular member 3, and accommodation The sealing member 49 interposed between the opening of the first flow path 21 on the bottom of the concave portion 23 and the lower end of the tubular member 3, and the receiving concave portion 23 of the valve body 2 A plurality that is airtightly or liquid-tightly fixed to the annular support 24 formed on the inner circumferential surface, and airtightly or liquid-tightly fixed to the annular support 37 formed on the outer circumferential surface of the cylindrical member 3, and communicates with the second flow path 22 By moving between the flexible annular plate 11 having an opening of the valve seat 48 and an open position and a closed position in contact with the valve seat 48, the first flow path 21 and the second flow path ( It has a diaphragm 41 for communicating and blocking 22).