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A Supervisory Control Methodology for Semiconductor Device Manufacturing

机译：半导体器件制造的监督控制方法

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来源
《AEC/APC symposium XV》|2003年|1-2|共2页
会议地点 Colorado Springs CO(US);Colorado Springs CO(US)
作者
Richard Good; S. Joe Qin;
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作者单位

Advanced Micro Devices, Austin, Texas The University of Texas at Austin, Austin, Texas;

The University of Texas at Austin, Austin, Texas;

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原文格式 PDF
正文语种 eng
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专利

1. A structured adaptive supervisory control methodology for modeling the control of a discrete event manufacturing system [J] . Qiu R.G., Joshi S.B. IEEE transactions on systems, man, and cybernetics. Part A . 1999,第6期

机译：用于对离散事件制造系统的控制进行建模的结构化自适应监督控制方法
2. SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment [J] . JIN-HWAN LEE, TAE-EOG LEE IEEE Robotics & Automation Magazine . 2004,第1期

机译：SECAM：集成半导体制造设备的监督设备控制应用模型
3. Manufacturing Quality Control Systems of Power Semiconductor Devices and Informative Parameters of Their Reliability [J] . A. V. Efanov, A. B. Ershov, V. N. Shemyakin, Russian electrical engineering . 2019,第3期

机译：功率半导体器件的制造质量控制系统及其可靠性的信息参数
4. A Supervisory Control Methodology for Semiconductor Device Manufacturing [C] . Advanced equipment control / advanced process control symposium . 2003

机译：半导体器件制造的监督控制方法
5. A PLC-based implementation methodology for the supervisory control of manufacturing workcells using extended Moore automata. [D] . Ficocelli, Maurizio. 2002

机译：基于PLC的实施方法论，用于使用扩展的摩尔自动机对制造工作单元进行监督控制。
6. Controllable alignment of elongated microorganisms in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser microfabrication [O] . Jian Xu, Hiroyuki Kawano, Weiwei Liu, 2017

机译：使用混合飞秒激光微细加工制造的电流体设备可控地对准3D微空间中的细长微生物
7. Optimal pareto solutions of a dynamic C chart: An application of statistical process control on a semiconductor devices manufacturing process [O] . Lupo T., Sgroi F. 2015

机译：动态C图表的最佳pareto解决方案：统计过程控制在半导体器件制造过程中的应用
8. Electric-Current Controlled Liquid Phase Epitaxy of Compound Semiconductors for Microwave Devices. [R] . Eastman, L. F., Wood, C. E. C., Van Rees, B. 1979

机译：微波器件用复合半导体的电流控制液相外延。

A Supervisory Control Methodology for Semiconductor Device Manufacturing

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