FILTER CONTROLLING EXPRESSION DERIVATION METHOD, LIGHT MEASUREMENT SYSTEM, CONTROL METHOD FOR FABRY-PEROT INTERFERENCE FILTER, AND FILTER CONTROL PROGRAM

摘要

Provided is a filter controlling expression derivation method including: a preparation step of preparing a Fabry-Perot interference filter of which distance between a fixed mirror portion and a movable mirror portion is controlled by balancing an electrostatic force and an elastic force; a first derivation step of deriving a relational expression between a deflection amount and an elasticity index in which the elasticity index of the movable mirror portion is described as a quadratic or higher-order polynomial with the deflection amount of the movable mirror portion as a variable by performing predetermined measurement; and a second derivation step of deriving a relational expression between a transmission wavelength of light transmitted through the Fabry-Perot interference filter and the voltage as a filter controlling expression based on the relational expression between the deflection amount and the elasticity index and a relational expression between the electrostatic force and the elastic force, wherein, in the first derivation step, the transmission wavelength of light transmitted through the Fabry-Perot interference filter is measured in a state where each of a plurality of different voltages is applied as the voltage.