Energy-selecting electron microscope using electron optics

摘要

962,086. Electron microscopes. HITACHI Ltd. March 22, 1963 [March 27, 1962], No. 11463/63. Heading H1D. In an energy-selecting electron microscope low energy " inelastically scattered " electrons are deflected from the beam to give improved resolution. As shown, incident beam 1 passes through object 2 to produce diffraction spots 5 magnified at 8. An unipotential electrostatic energyanalysing lens 9 deflects lower energy electrons E1 to leave a monoenergetic beam E0 passing through aperture 10 to produce an image at 13. By moving the aperture 10 investigation of the lower energy inelastically scattered beams may be made.