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METALIZATION PROCESS FOR THE MANUFACTURE OF HYBRID INTEGRATED CIRCUITS

机译:混合集成电路制造的金属化工艺。

摘要

1387089 Printed circuits BENDIX CORP 18 Sept 1973 [2 Oct 1972] 43730/73 Heading H1R A printed circuit board is manufactured by depositing, e.g. by sputtering, a layer 11 of nickel-chromium on a substrate, then a layer 12 of nickel, e.g. by sputtering, then a layer 14 of nickel-boron, e.g. by electroless plating and then optionally a plated gold layer 13, and the assembly is heat treated to anneal and stabilize the resistive nickel-chromium layer. A pattern of resistive and/or conductive tracks is produced by masking and etching techniques. The presence of the nickel-boron layer is stated to permit low-temperature solder connections or ultrasonic wire bonding to be made, and so the assembly requires a shorter heat-treatment time. Assembly instructions or the like may be marked on the board by depositing a further layer of nickel-boron and masking and etching to leave the desired marking. Semi-conductor devices for mounting on the board advantageously have their connection regions coated, like the board, with successive layers of nickelchromium nickel, nickel-boron and optionally gold.
机译:1387089印刷电路BENDIX CORP 1973年9月18日[1972年10月2日] 43730/73标题H1R印刷电路板的制造方法是沉积例如通过溅射,在衬底上形成镍-铬层11,然后是例如镍的镍层12。通过溅射,然后形成镍-硼层14,例如镍。通过化学镀,然后可选地镀金层13,对该组件进行热处理,以退火并稳定电阻镍铬层。电阻和/或导电迹线的图案通过掩膜和蚀刻技术产生。据称镍硼层的存在允许进行低温焊料连接或超声引线键合,因此该组件需要更短的热处理时间。可以通过在基板上沉积另一层镍-硼并进行掩膜和蚀刻以在所需的标记上标记组装说明等。有利地,用于安装在板上的半导体器件的连接区域像板一样涂覆有连续的镍铬镍,镍硼和金。

著录项

  • 公开/公告号JPS4972657A

    专利类型

  • 公开/公告日1974-07-13

    原文格式PDF

  • 申请/专利权人

    申请/专利号JP19730111346

  • 发明设计人

    申请日1973-10-02

  • 分类号H01C17/06;H01L21/00;H01L21/48;H01L21/607;H01L23/15;H01L23/498;H01L23/522;H05K1/03;H05K1/09;H05K1/16;H05K3/06;H05K3/24;H05K3/38;

  • 国家 JP

  • 入库时间 2022-08-23 06:21:30

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