SYSTEM FOR MOUNTING AN OPTICAL LENS IN A HOLDER FOR LIMITED MOVEMENT ALONG A FIXED AXIS

摘要

A pair of flexible washers are used to mount a workpiece in a fixed outer holder for precise movement along a fixed axis A. Inner portions of the washers are secured to spaced portions along the workpiece so that the washers project from the workpiece in spaced planes perpendicular to the axis A. Outer portions of the washers are clamped in the holder so that they cannot move. The inner portions of the washers are free to move with the workpiece, so that this mounting permits limited movement of the workpiece precisely along the fixed axis A. The system is particularly advantageous in positioning of optical lenses such as are used in focusing a laser beam on a substrate, where the position of the lens must be adjusted to follow the surface of the substrate.