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SEMICONDUCTOR DEVICES HAVING LOW MINORITY CARRIER LIFETIME AND PROCESS FOR PRODUCING SAME
SEMICONDUCTOR DEVICES HAVING LOW MINORITY CARRIER LIFETIME AND PROCESS FOR PRODUCING SAME
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机译:少数族裔运营商的生命周期短且生产过程相同的半导体设备
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摘要
Silicon diodes and silicon controlled rectifiers are provided with reduced minority carrier lifetimes without a significant increase in forward voltage drop or reverse leakage current by means of a gadolinium dopant which is diffused into the semiconductor wafers after first being applied on one face thereof by means of a conventional sputtering process. Gadolinium is sputtered onto the base side of the rectifiers from a foil of the pure metal in a vacuum. The wafers are then placed in a furnace at a temperature above 820 DEG C where the diffusion process takes place.
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